標題: | Field Emission Properties of Carbon Nanotube Arrays on the Thickness-Controlled Flexible Substrate by the Pattern Transfer Process |
作者: | Chang, Chia-Tsung Juan, Chuan-Ping Lin, Yi-Chan Li, Yu-Ren Tsai, Wan-Lin Yang, Po-Yu Lee, I-Che Cheng, Huang-Chung 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
關鍵字: | Carbon Nanotube (CNT);Polydimethylsiloxane (PDMS);Field Emission;Flexible |
公開日期: | 1-七月-2012 |
摘要: | A technigal with the polydimethylsiloxane (PDMS) solution infiltrated into the SiOx-coated CNTAs has been utilized to directly transfer the CNTAs away from the silicon substrate. The oxide coating layer was utilized to protect the morpholgy of as-grown patterned vertical aligmed carbon nanotube (CNTs) arrays. The high density plasma reactive ions etching (HDP-RIE) system was used to make the CNTs emerge from the surface of the flexible substrate and modify the crystallines of CNTs. After the protecting oxide was HDP-RIE-processed for 8 min, the emission current properties were enhanced to be 1.03 V/mu m and 1.43 V/mu m, respectively, for the turn-on field and the threshold field, as compared with 1.25 V/mu m and 1.59 V/mu m for the as-grown CNTs, accordingly. The Field Emission (FE) enhancement after dry etching could be attributed to the open-ended structures and better crystalline. |
URI: | http://dx.doi.org/10.1166/jnn.2012.6241 http://hdl.handle.net/11536/16951 |
ISSN: | 1533-4880 |
DOI: | 10.1166/jnn.2012.6241 |
期刊: | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY |
Volume: | 12 |
Issue: | 7 |
起始頁: | 5742 |
結束頁: | 5746 |
顯示於類別: | 期刊論文 |