標題: Field Emission Properties of Carbon Nanotube Arrays on the Thickness-Controlled Flexible Substrate by the Pattern Transfer Process
作者: Chang, Chia-Tsung
Juan, Chuan-Ping
Lin, Yi-Chan
Li, Yu-Ren
Tsai, Wan-Lin
Yang, Po-Yu
Lee, I-Che
Cheng, Huang-Chung
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: Carbon Nanotube (CNT);Polydimethylsiloxane (PDMS);Field Emission;Flexible
公開日期: 1-七月-2012
摘要: A technigal with the polydimethylsiloxane (PDMS) solution infiltrated into the SiOx-coated CNTAs has been utilized to directly transfer the CNTAs away from the silicon substrate. The oxide coating layer was utilized to protect the morpholgy of as-grown patterned vertical aligmed carbon nanotube (CNTs) arrays. The high density plasma reactive ions etching (HDP-RIE) system was used to make the CNTs emerge from the surface of the flexible substrate and modify the crystallines of CNTs. After the protecting oxide was HDP-RIE-processed for 8 min, the emission current properties were enhanced to be 1.03 V/mu m and 1.43 V/mu m, respectively, for the turn-on field and the threshold field, as compared with 1.25 V/mu m and 1.59 V/mu m for the as-grown CNTs, accordingly. The Field Emission (FE) enhancement after dry etching could be attributed to the open-ended structures and better crystalline.
URI: http://dx.doi.org/10.1166/jnn.2012.6241
http://hdl.handle.net/11536/16951
ISSN: 1533-4880
DOI: 10.1166/jnn.2012.6241
期刊: JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume: 12
Issue: 7
起始頁: 5742
結束頁: 5746
顯示於類別:期刊論文