標題: Study of Metals by Femtosecond Laser Processing for Electro-Optics Applications
作者: Chang, Cho-Wei
Chang, Tien-Li
Tsai, Ting-Kai
Ting, Chia-Jen
Wang, Chien-Ping
Chou, Chang-Pin
機械工程學系
Department of Mechanical Engineering
關鍵字: femtosecond laser;metals;solar cells;CIGS thin-film;electronics;electro-optics
公開日期: 2012
摘要: Femtosecond laser (FS-laser) microstructuring of metals has become a promising tool because of its non-contact nature, which allows the micromachining and direct processing of materials with a minimized volume of heat-affected zone for electro-optics applications such as light emitting diodes (LED) and solar photovoltaic (PV) lighting. This study presents ultra-short pulse (10(-15) sec) FS-laser processing. Through integrating the laser source, optical system and dynamic control modules, the materials of metals with micro-scale or nano-scale structures can be fabricated. In traditional processing such as semiconductor processing, development, exposure and etching necessitate expensive equipment and time-consuming tasks. With FS-laser processing, high-precision patterns are obtained, which will be a great benefit to keeping costs down. In this study, the wavelengths of FS-laser ablation are employed using visible and infrared light. To make a breakthrough in electro-optics processes, the CIGS thin-film of solar cells in metal process can be easily produced by the FS-laser. The ablation speed of the FS-laser for thin film layer CIGS solar cells can reach 2000 mm/s which is faster than the current Nd:YAG laser machine (similar to 1000 mm/s). On the other hand, the minimum size of metal lines can be controlled to a value that is lower than 40 mu m. Furthermore, green energy can be effectively developed for the future.
URI: http://hdl.handle.net/11536/17034
http://dx.doi.org/10.4028/www.scientific.net/KEM.516.263
ISSN: 1013-9826
DOI: 10.4028/www.scientific.net/KEM.516.263
期刊: PROCEEDINGS OF PRECISION ENGINEERING AND NANOTECHNOLOGY (ASPEN2011)
Volume: 516
起始頁: 263
結束頁: 268
顯示於類別:會議論文