標題: A distributed simulation-based computational intelligence algorithm for nanoscale semiconductor device inverse problem
作者: Li, Yiming
Chen, Cheng-Kai
電信工程研究所
Institute of Communications Engineering
公開日期: 2006
摘要: In this paper, a distributed simulation-based computational intelligence algorithm for inverse problem of nanoscale semiconductor device is presented. This approach features a simulation-based optimization strategy, and mainly integrates the semiconductor process simulation, semiconductor device simulation, evolutionary strategy, and empirical knowledge on a distributed computing environment. For a set of given target current-voltage (I-V) curves of metal-oxide-semi conductor field effect transistors (MOSFETs) devices, the developed prototype executes evolutionary tasks to solve an inverse doping profile problem, and therefore optimize fabrication recipes. In the evolutionary loop, the established management server allocates the jobs of process simulation and device simulation on a PC-based Linux cluster with message passing interface (MPI) libraries. Good benchmark results including the speed-up, the load balancing, and the parallel efficiency are presented. Computed results, compared with the realistic measured data of 65 nm n-type MOSFET, show the accuracy and robustness of the method.
URI: http://hdl.handle.net/11536/17101
ISBN: 978-3-540-49860-5
ISSN: 0302-9743
期刊: FRONTIERS OF HIGH PERFORMANCE COMPUTING AND NETWORKING - ISPA 2006 WORKSHOPS, PROCEEDINGS
Volume: 4331
起始頁: 231
結束頁: 240
顯示於類別:會議論文