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dc.contributor.authorChiu, Yien_US
dc.contributor.authorKuo, Chiung-Tingen_US
dc.contributor.authorChu, Yu-Shanen_US
dc.date.accessioned2014-12-08T15:24:57Z-
dc.date.available2014-12-08T15:24:57Z-
dc.date.issued2006en_US
dc.identifier.isbn978-2-916187-03-7en_US
dc.identifier.urihttp://hdl.handle.net/11536/17337-
dc.description.abstractThis paper presents a micro electrostatic vibration-to-electricity energy converter. For the 3.3 V supply voltage and 1 cm(2) chip area constraints, optimal design parameters were found from theoretical calculation and Simulink simulation. In the current design, the output power is 200 mu W/cm(2) for the optimal load of 8 M Omega. The device was fabricated in a silicon-on-insulator (SOI) wafer. Mechanical and electrical measurements were conducted. Residual particles caused shortage of the variable capacitor and the output power could not be measured. Device design and fabrication processes are being refined.en_US
dc.language.isoen_USen_US
dc.titleDesign and fabrication of a micro electrostatic vibration-toelectricity energy converteren_US
dc.typeProceedings Paperen_US
dc.identifier.journalDTIP 2006: Symposium on Design,Test, Integration and Packaging of MEMS/MOEMS 2006en_US
dc.citation.spage298en_US
dc.citation.epage303en_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.identifier.wosnumberWOS:000245806000057-
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