Self-substrate-triggered technique to enhance turn-on uniformity of multi-finger ESD protection devices

Abstract

A novel self-substrate-triggered (SST) technique is proposed to solve the non-uniform turn-on issue of the multi-finger GGNMOS for ESD protection. The first turned-on center finger is used to trigger on all fingers in the GGNMOS structure with self-substrate-triggered technique. So, the turn-on uniformity and ESD robustness of GGNMOS can be greatly improved by the new proposed self-substrate-triggered technique.