標題: | Petri net-based design of modular supervisors for remotely human control systems |
作者: | Lee, JS Zhou, MC Hsu, PL 電控工程研究所 Institute of Electrical and Control Engineering |
關鍵字: | human-in-the-loop;Internet-based control systems;modular supervision;Petri nets;rapid thermal processes;and supervisory control |
公開日期: | 2004 |
摘要: | In an Internet-based control system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper extends the remote supervisory scheme in [5] to a modular one so as to reduce the supervisor synthesis complexity. Also, remote human issued commands are guaranteed to meet required specifications. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach. |
URI: | http://hdl.handle.net/11536/18336 |
ISBN: | 4-907764-22-7 |
期刊: | SICE 2004 Annual Conference, Vols 1-3 |
起始頁: | 1271 |
結束頁: | 1276 |
顯示於類別: | 會議論文 |