標題: | A FIBEROPTIC REFLECTIVE DISPLACEMENT MICROMETER |
作者: | KO, WH CHANG, KM HWANG, GJ 交大名義發表 National Chiao Tung University |
關鍵字: | DISPLACEMENT MICROMETERS;FIBER OPTICS |
公開日期: | 1-六月-1995 |
摘要: | A simple fiber-optic reflection displacement micrometer with a sensitivity of 200 mV mu m(-1) and a resolution as low as 0.01 mu m is reported with a theoretical explanation of the experimental results. The sensor consists of a pulsed LED light source and a pair (A and B) of identical receiving fibers and photodetectors that detects the light reflected from the surface being measured. The differential signal (A-B) of the detectors is proportional to the displacement of the surface relative to a null position. The light intensity variation of the source and the reflectance change of the surface are compensated when the (A-B) signal is divided by the sum (A+B). The resolution is limited by noise and interference (vibration of the base). A resolution of 0.01 mu m can be achieved at narrow signal bands (d.c, to 3 Hz) excluding the low-frequency noise and vibration. The range, sensitivity and non-linearity can be adjusted according to the theory. The micrometer offers the advantages of non-contact, no electrical interference, simplicity, low cost and portability. It can be used in medical experiments and laboratory instruments. |
URI: | http://hdl.handle.net/11536/1869 |
ISSN: | 0924-4247 |
期刊: | SENSORS AND ACTUATORS A-PHYSICAL |
Volume: | 49 |
Issue: | 1-2 |
起始頁: | 51 |
結束頁: | 55 |
顯示於類別: | 期刊論文 |