Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes

Full metadata record

DC Field	Value	Language
dc.contributor.author	Chiou, JC	en_US
dc.contributor.author	Lin, YC	en_US
dc.contributor.author	Wu, SD	en_US
dc.date.accessioned	2014-12-08T15:26:30Z	-
dc.date.available	2014-12-08T15:26:30Z	-
dc.date.issued	2002	en_US
dc.identifier.isbn	0-7803-7595-5	en_US
dc.identifier.uri	http://hdl.handle.net/11536/18824	-
dc.language.iso	en_US	en_US
dc.title	Closed-loop fuzzy control of torsional micromirror with multiple electrostatic electrodes	en_US
dc.type	Proceedings Paper	en_US
dc.identifier.journal	2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST	en_US
dc.citation.spage	85	en_US
dc.citation.epage	86	en_US
dc.contributor.department	電控工程研究所	zh_TW
dc.contributor.department	Institute of Electrical and Control Engineering	en_US
dc.identifier.wosnumber	WOS:000178015700041	-
Appears in Collections:	Conferences Paper