標題: Characteristics of low-temperature-prepared (Ba, Sr)TiO3 films post treated by novel excimer laser annealing
作者: Shye, DC
Chiou, BS
Hwang, CC
Chen, JS
Su, IW
Chou, CC
Cheng, HC
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: excimer laser annealing;low temperature;texture;residual gas analyzer (RGA)
公開日期: 2002
摘要: Thin (Ba0.5Sr0.5)TiO3 (BST) films were sputtered on Pt[FiN/Ti/Si multilayer substrates at very low temperature (150degrees C). A novel process, using wavelength 248-nm KrF excimer laser annealing (ELA), has been undertaken to implement barium strontium titanate (BST) films at a low process temperature of 300degrees C. The crystallinity and dielectric constant are greatly improved after ELA treatment. In this work, the variation of texture was investigated. Besides, the escaped oxygen atoms from BST films were detected in-situ using a residual gas analyzer (RGA) during ELA process. Thus, the degradation of upper surface is strongly influenced by the laser energy fluence for an ELA-BST film.
URI: http://hdl.handle.net/11536/18857
ISBN: 0-7803-7414-2
期刊: ISAF 2002: PROCEEDINGS OF THE 13TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS
起始頁: 227
結束頁: 230
Appears in Collections:Conferences Paper