Title: Prioritized automatic material handling services in 300mm foundry manufacturing
Authors: Wang, CN
Liao, DY
交大名義發表
National Chiao Tung University
Keywords: 300mm manufacturing;wafer foundry;AMHS;OHT dispatching;hot lot
Issue Date: 2002
Abstract: This paper present's a heuristic approach for differentiating material handling services in a highly automated environment of 300mm foundry manufacturing. A preemptive dispatching policy, Highest Priority Job (HPJ) first, is proposed to expedite the. movement of high priority products while keeping acceptable the incurred delays on regular ones. Simulation experiments based on-realistic data from a local 300mm foundry fab are conducted. Numerical results demonstrate that the proposed policy is excellent in reducing the transport delays of high priority products to some extremes. Features of HPJ are also discussed.
URI: http://hdl.handle.net/11536/18932
ISBN: 0-7803-7604-8
Journal: 2002 SEMICONDUCTOR MANUFACTURING TECHNOLOGY WORKSHOP
Begin Page: 109
End Page: 114
Appears in Collections:Conferences Paper