標題: | AlSixOy as a high transmittance embedded material for AttPSM and the correlation between the chemical compositions and optical properties of AlSixOy in 193 nm lithography |
作者: | Lin, CM 應用化學系 Department of Applied Chemistry |
公開日期: | 2000 |
URI: | http://hdl.handle.net/11536/19309 |
ISBN: | 4-89114-004-6 |
期刊: | MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS |
起始頁: | 12 |
結束頁: | 13 |
顯示於類別: | 會議論文 |