標題: AlSixOy as a high transmittance embedded material for AttPSM and the correlation between the chemical compositions and optical properties of AlSixOy in 193 nm lithography
作者: Lin, CM
應用化學系
Department of Applied Chemistry
公開日期: 2000
URI: http://hdl.handle.net/11536/19309
ISBN: 4-89114-004-6
期刊: MICROPROCESSES AND NANOTECHNOLOGY 2000, DIGEST OF PAPERS
起始頁: 12
結束頁: 13
顯示於類別:會議論文