完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Shen, LC | en_US |
dc.contributor.author | Hsu, PL | en_US |
dc.date.accessioned | 2014-12-08T15:27:19Z | - |
dc.date.available | 2014-12-08T15:27:19Z | - |
dc.date.issued | 1998 | en_US |
dc.identifier.isbn | 0-08-042381-7 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/19565 | - |
dc.description.abstract | This paper presents a real-time intelligent supervision system for IC ion implantation processes. A hardware interface is developed to directly extract the features from the 2-D analog image signals of a beam map. A qualitative model for the beam scanning is then obtained and the symptoms of abnormal operations can be analyzed to achieve on-line diagnosis. Furthermore, a fuzzy expert system is developed to advise operators taking appropriate adjustment for the beam scanning. This supervisory system has been implemented on Eaten NV-6200 A/AV ion implanters at the Taiwan Semiconductor Manufacturing Company. Copyright (C) 1998 IFAC. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | ion implantation | en_US |
dc.subject | beam map | en_US |
dc.subject | supervision | en_US |
dc.subject | feature extraction | en_US |
dc.subject | symptom analysis | en_US |
dc.subject | fuzzy expert system | en_US |
dc.title | An intelligent supervision system for the ion implementation in IC fabrication processes | en_US |
dc.type | Proceedings Paper | en_US |
dc.identifier.journal | (SAFEPROCESS'97): FAULT DETECTION, SUPERVISION AND SAFETY FOR TECHNICAL PROCESSES 1997, VOLS 1-3 | en_US |
dc.citation.spage | 611 | en_US |
dc.citation.epage | 616 | en_US |
dc.contributor.department | 電控工程研究所 | zh_TW |
dc.contributor.department | Institute of Electrical and Control Engineering | en_US |
dc.identifier.wosnumber | WOS:000079972000096 | - |
顯示於類別: | 會議論文 |