SIMULATION STUDY OF A NEW PHASE-SHIFTING MASK - HALFTONE-RIM

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A1995BD19S00039.pdf (367.54 KB)

Date

Authors

DOI

10.1117/12.209275

Keywords

PHASE-SHIFTING MASK , HALF-TONE , RIM , HALF-TONE-RIM , SIMULATION , OFF-AXIS ILLUMINATION , SUBMICRON LITHOGRAPHY

URI

http://dx.doi.org/10.1117/12.209275
https://ir.lib.nycu.edu.tw/handle/11536/19976

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