Rapid thermal chemical vapor deposition of nitrogen-doped polysilicon for high-performance and high-reliability CMOS technology

標題:	Rapid thermal chemical vapor deposition of nitrogen-doped polysilicon for high-performance and high-reliability CMOS technology
作者:	Sun, SC Wang, LS Yeh, FL 電機學院 College of Electrical and Computer Engineering
公開日期:	1995
URI:	http://hdl.handle.net/11536/20006
ISBN:	1-55899-290-1
ISSN:	0272-9172
期刊:	RAPID THERMAL AND INTEGRATED PROCESSING IV
Volume:	387
起始頁:	329
結束頁:	334
顯示於類別：	會議論文