標題: | Rapid thermal chemical vapor deposition of in-situ nitrogen-doped polysilicon for dual gate CMOS |
作者: | Sun, SC Wang, LS Yeh, FL Chen, CH 奈米中心 Nano Facility Center |
公開日期: | 1995 |
URI: | http://hdl.handle.net/11536/20049 http://dx.doi.org/10.1109/VLSIT.1995.520887 |
ISBN: | 0-7803-2602-4 |
DOI: | 10.1109/VLSIT.1995.520887 |
期刊: | 1995 SYMPOSIUM ON VLSI TECHNOLOGY: DIGEST OF TECHNICAL PAPERS |
起始頁: | 121 |
結束頁: | 122 |
顯示於類別: | 會議論文 |