標題: Low cost high-efficiency high-density-plasma Silicon-based thin film solar cells with high light-soaking stability
作者: Hsiao, T. H.
Shieh, J. M.
Yu, P. C.
Shen, C. H.
Kao, M. H.
Chiou, U. P.
Hsieh, W. H.
光電工程學系
Department of Photonics
關鍵字: amorphous silicon;ICP-CVD;photovoltaic cells
公開日期: 2012
摘要: We investigate the performance of a single-junction amorphous Si (a-Si) and a-Si/a-Si tandem solar cells fabricated with Inductively Coupled Plasma (ICP) deposition technique. The high-density plasma resulting from high dissociation capacity of ICP enables good-quality hydrogenated Si films to be synthesized at low temperatures. High-density ICP also promotes the diffusion of reactive radicals on substrates and forms a-Si:H films with low defect density. We demonstrate single-junction a-Si solar cells and a-Si/a-Si tandem solar cell with a conversion efficiency of 9.6% and 8.8%, respectively. Highly light-soaking stable high-density plasma-fabricated a-Si and a-Si/a-Si solar cells were demonstrated with photo-induced degradation in conversion-efficiency as low as 7% and 5%, respectively.
URI: http://hdl.handle.net/11536/20552
ISBN: 978-1-4673-0066-7
期刊: 2012 38TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC)
起始頁: 1201
結束頁: 1204
顯示於類別:會議論文