標題: | IMPROVEMENT OF SELECTIVITY DURING DIAMOND GROWTH UTILIZING A NEW PROCESS |
作者: | CHEN, CF CHEN, SH HONG, TM TSAI, MH 交大名義發表 材料科學與工程學系 National Chiao Tung University Department of Materials Science and Engineering |
公開日期: | 15-一月-1995 |
URI: | http://dx.doi.org/10.1063/1.359023 http://hdl.handle.net/11536/2100 |
ISSN: | 0021-8979 |
DOI: | 10.1063/1.359023 |
期刊: | JOURNAL OF APPLIED PHYSICS |
Volume: | 77 |
Issue: | 2 |
起始頁: | 940 |
結束頁: | 942 |
顯示於類別: | 期刊論文 |