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dc.contributor.authorHuang, Chien-Yaoen_US
dc.contributor.authorHsiao, Wen-Tseen_US
dc.contributor.authorHuang, Kuo-Chengen_US
dc.contributor.authorChang, Keng-Souoen_US
dc.contributor.authorChou, Hsiao-Yuen_US
dc.contributor.authorChou, Chang-Pinen_US
dc.date.accessioned2014-12-08T15:29:12Z-
dc.date.available2014-12-08T15:29:12Z-
dc.date.issued2011-08-01en_US
dc.identifier.issn0960-1317en_US
dc.identifier.urihttp://dx.doi.org/10.1088/0960-1317/21/8/085020en_US
dc.identifier.urihttp://hdl.handle.net/11536/21048-
dc.description.abstractIn recent years, micro-lens arrays (MLAs) have become important elements of optical systems. One function of MLAs is to create a uniform intensity of light. Compared with one-sided MLAs, the uniformity of light intensity increases with double-sided MLAs. MLAs fabricated by glass can be used in higher temperature environments or in high-energy systems. Glass-based MLAs can be fabricated by laser machining, photolithography, precision diamond grinding process and precision glass molding (PGM) technologies, but laser machining, photolithography and precision diamond grinding process technologies are not the perfect approach for mass production. Therefore, this paper proposes a method to fabricate a mold by laser micro-machining and a double-sided MLA by a PGM process. First, a micro-hole array was fabricated on the surface of a silicon carbide mold. A double-sided MLA using two molds was then formed by a PGM process. In this paper, the PGM process parameters including molding temperature and molding force are discussed. Moreover, the profile of a double-sided MLA is discussed. Finally, a double-sided MLA with a diameter of 20 mm, and lenses with a height of 52 mu m, a radius of 851 mu m and a pitch of 700 mu m were formed on glass.en_US
dc.language.isoen_USen_US
dc.titleFabrication of a double-sided micro-lens array by a glass molding techniqueen_US
dc.typeArticleen_US
dc.identifier.doi10.1088/0960-1317/21/8/085020en_US
dc.identifier.journalJOURNAL OF MICROMECHANICS AND MICROENGINEERINGen_US
dc.citation.volume21en_US
dc.citation.issue8en_US
dc.citation.epageen_US
dc.contributor.department機械工程學系zh_TW
dc.contributor.departmentDepartment of Mechanical Engineeringen_US
dc.identifier.wosnumberWOS:000293163700020-
dc.citation.woscount7-
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