标题: | Chemical vapor deposition of diamond on silicon substrates coated with adamantane in glycol chemical solutions |
作者: | Chen, Yi-Chun Chang, Li 材料科学与工程学系 Department of Materials Science and Engineering |
公开日期: | 2013 |
摘要: | Diamonds were synthesized on adamantane-coated mirror-polished Si (100) substrates by microwave plasma chemical vapor deposition (MPCVD) using a gas mixture of H-2 and CH4. Before MPCVD deposition, Si substrates were dip-coated in chemical solutions of ethylene glycol and diethylene glycol with adamantane. With the coating of adamantane, the diamond nucleation can be enhanced with a density over 1 x 10(8) cm(-2) and the deposited diamond films are shown to be of good crystallinity by scanning electron microscopy and Raman spectrometry. The study demonstrates a simple and efficient way of diamond deposition on a smooth Si substrate. |
URI: | http://hdl.handle.net/11536/21095 http://dx.doi.org/10.1039/c2ra22486k |
ISSN: | 2046-2069 |
DOI: | 10.1039/c2ra22486k |
期刊: | RSC ADVANCES |
Volume: | 3 |
Issue: | 5 |
起始页: | 1514 |
结束页: | 1518 |
显示于类别: | Articles |
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