標題: | Fabrication and ferroelectric properties of BiFeO3/LaNiO3 artificial superlattice structures grown by radio-frequency magnetron-sputtering |
作者: | Liu, Yen-Ting Chiu, Shang-Jui Lee, Hsin-Yi Chen, San-Yuan 材料科學與工程學系 加速器光源科技與應用學位學程 Department of Materials Science and Engineering Master and Ph.D. Program for Science and Technology of Accelrrator Light Source |
關鍵字: | Superlattice;RF sputtering;X-ray scattering |
公開日期: | 1-Feb-2013 |
摘要: | Symmetric superlattice structures of multiferroic BiFeO3 and conductive LaNiO3 sublayers were grown on a Nb-doped SrTiO3 substrate with radio-frequency magnetron-sputtering. The formation of a superlattice structure was confirmed from the appearance of satellite lines on both sides of the main line in the X-ray diffraction pattern. X-ray measurements show that these superlattice films become subject to greater tensile stress along the c-axis and to increased compressive stress parallel to the surface plane with a decreasing thickness of the sublayer. The smaller is the thickness of the sublayer, the greater is the crystalline quality and the strain state. The hysteresis loops show a large leakage current at frequencies of 0.5 and 1 kHz; the polarization decreases with an increasing frequency. (C) 2012 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.tsf.2012.07.073 http://hdl.handle.net/11536/21446 |
ISSN: | 0040-6090 |
DOI: | 10.1016/j.tsf.2012.07.073 |
期刊: | THIN SOLID FILMS |
Volume: | 529 |
Issue: | |
起始頁: | 66 |
結束頁: | 70 |
Appears in Collections: | Articles |
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