標題: Development of a high performance integrated sensor chip with a multi-walled carbon nanotube assisted sensing array
作者: Chuang, Pi Kai
Wang, Li Chun
Kuo, Cheng Tzu
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: Multi-walled carbon nanotubes;Gas sensors;Toxic gases
公開日期: 1-二月-2013
摘要: For room temperature toxic gas sensing, a system chip with a MWCNT (multi-walled carbon nanotube)-assisted array of 30 sensors (two sensors for each of 15 sensor types) was developed. Gases tested include four simulants of chemical warfare agents: dichloromethane, acetonitrile, 2-chloroethyl ethyl sulfide, and dimethyl-methyl phosphonate (DMMP). By selecting 15 different functional polymer materials, each composite sensor composed of 15 sensing stacks (polymer/MWCNTs/Si(001), wafer) was fabricated by a solution droplet casting method to simplify the process. The principle of gas sensing is basically to measure the resistivity change of the composite sensor device upon contact with a target gas. One of the advantages of the sensing stack having a polymer overlayer above the MWCNT layer is being able to protect the MWCNT from direct interaction with the gas to improve sensor life and sensitivity. The results indicate that a fingerprint pattern of the sensor radar plot can be determined for each testing run, and that specificity can be achieved through a 3-D principal component analysis of the radar plots. The results also show that a linear relationship between the resistance response and concentration is clearly evident for these four toxic gases. By extrapolation and careful process monitoring, a sensitivity much lower than 43 ppm for DMMP vapor is likely. The gas sensing mechanisms are discussed in the text. (C) 2012 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.tsf.2012.09.024
http://hdl.handle.net/11536/21453
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.09.024
期刊: THIN SOLID FILMS
Volume: 529
Issue: 
起始頁: 205
結束頁: 208
顯示於類別:期刊論文


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