完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Yang, Shih-Wei | en_US |
dc.contributor.author | Lin, Chern-Sheng | en_US |
dc.contributor.author | Lin, Shir-Kuan | en_US |
dc.contributor.author | Fu, Shu-Hsien | en_US |
dc.contributor.author | Yeh, Mau-Shiun | en_US |
dc.date.accessioned | 2014-12-08T15:29:56Z | - |
dc.date.available | 2014-12-08T15:29:56Z | - |
dc.date.issued | 2013 | en_US |
dc.identifier.issn | 0144-5154 | en_US |
dc.identifier.uri | http://hdl.handle.net/11536/21469 | - |
dc.identifier.uri | http://dx.doi.org/10.1108/01445151311294720 | en_US |
dc.description.abstract | Purpose - The purpose of this paper is to propose an automatic optical inspection system for measuring the surface profile of a microlens array. Design/methodology/approach - The system set-up was constructed according to the principle of the Fizeau interferometer. After capturing the ring interference fringe images of the microlens with a camera, the diameter, profile information and optical properties were analyzed through a microlens surface profile algorithm using innovative image pre-processing with a precision of less than 0.09 micron. Findings - By integrating with the genetic algorithm, the XY-Table shortest moving path of the system is calculated to achieve the purpose of highspeed inspection and automatic microlens array surface profile measurement. Originality/value - The measurement results of this system were also compared with other systems, including the atomic force microscope and stylus profiler, to verify the measurement precision and accuracy of this system. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | Inspection | en_US |
dc.subject | Automation | en_US |
dc.subject | Genetic algorithms | en_US |
dc.subject | Surface properties of materials | en_US |
dc.subject | Automatic optical inspection system | en_US |
dc.subject | Microlens array | en_US |
dc.subject | Surface profile | en_US |
dc.title | An automatic optical inspection system for measuring a microlens array with an optical interferometric microscope and genetic algorithm | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1108/01445151311294720 | en_US |
dc.identifier.journal | ASSEMBLY AUTOMATION | en_US |
dc.citation.volume | 33 | en_US |
dc.citation.issue | 1 | en_US |
dc.citation.spage | 57 | en_US |
dc.citation.epage | 67 | en_US |
dc.contributor.department | 電控工程研究所 | zh_TW |
dc.contributor.department | Institute of Electrical and Control Engineering | en_US |
dc.identifier.wosnumber | WOS:000316240000006 | - |
dc.citation.woscount | 2 | - |
顯示於類別: | 期刊論文 |