Power-Rail ESD Clamp Circuit With Diode-String ESD Detection to Overcome the Gate Leakage Current in a 40-nm CMOS Process

Abstract

A new silicon controlled rectifier-based power-rail electrostatic discharge (ESD) clamp circuit was proposed with a novel trigger circuit that has very low leakage current in a small layout area for implementation. This circuit was successfully verified in a 40-nm CMOS process by using only low-voltage devices. The novel trigger circuit uses a diode-string based level-sensing ESD detection circuit, but not using MOS capacitor, which has very large leakage current. Moreover, the leakage current on the ESD detection circuit is further reduced, adding a diode in series with the trigger transistor. By combining these two techniques, the total silicon area of the power-rail ESD clamp circuit can be reduced three times, whereas the leakage current is three orders of magnitude smaller than that of the traditional design.