標題: | Enhancement of detection by selective modification of silicon nanobelt field-effect transistors via localized Joule heating |
作者: | Liu, Hao Heng Lin, Tzung Han Sheu, Jeng-Tzong 材料科學與工程學系奈米科技碩博班 Graduate Program of Nanotechnology , Department of Materials Science and Engineering |
關鍵字: | Methoxy-poly (ethylene-glycol)-silane;Silicon nanobelt field-effect transistor;Localized Joule heating;Selective modification;Streptavidin |
公開日期: | 1-三月-2014 |
摘要: | We utilized localized Joule heating to ablate methoxy-poly (ethylene-glycol)-silane (mPEG-sil) modified on the p(-) region of an n(+)-p(-)-n(+) silicon nanobelt field-effect transistor (SNFET). SNFETs with selective modifications of 3-aminopropyltrimethoxysilane (APTMS) and NHS-biotin on the ablated region exhibited a faster sensing response rate and a higher sensitivity in real-time detection of Streptavidin (SA). Characterization of the ablated region via lateral force microscopy and the fluorescence image show that the ablation region occurs only in the p(-) region near the drain side and is believed to be a result of the impact ionization mechanism during Joule heating. Moreover, a bias of 20 V pulse voltage for 1 ms successfully ablates mPEG-sil and reduces the device off leakage current by 1 order after Joule heating. However, Joule heating with a pulse voltage larger than 20V (1 ms) yielded an increase of device off leakage owing to damage to gate dielectrics during Joule heating. A comparison of real-time detection of SA between selectively and non-selectively modified chips shows that selectively modified ones exhibit a better limit of detection (LOD) that is one order lower than non-selectively modified ones, and a sensing response rate twice as fast as the non-selectively modified one for every target concentration. (C) 2013 Elsevier B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/j.snb.2013.10.102 http://hdl.handle.net/11536/23575 |
ISSN: | 0925-4005 |
DOI: | 10.1016/j.snb.2013.10.102 |
期刊: | SENSORS AND ACTUATORS B-CHEMICAL |
Volume: | 192 |
Issue: | |
起始頁: | 111 |
結束頁: | 116 |
顯示於類別: | 期刊論文 |