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dc.contributor.authorChiu, Yen_US
dc.contributor.authorChen, CHen_US
dc.contributor.authorChiou, JCen_US
dc.contributor.authorFang, WLen_US
dc.contributor.authorShieh, HPDen_US
dc.date.accessioned2014-12-08T15:35:26Z-
dc.date.available2014-12-08T15:35:26Z-
dc.date.issued2005-02-01en_US
dc.identifier.issn0018-9464en_US
dc.identifier.urihttp://dx.doi.org/10.1109/TMAG.2004.842077en_US
dc.identifier.urihttp://hdl.handle.net/11536/23986-
dc.description.abstractThe technology challenges for miniature optical pickups include high-numerical-aperture objective lens design, servo actuator functions and performance, and component assembly tolerance. In this paper, a microelectromechanical systems (MEMS)-based miniature optical pickup is proposed for DVD and blue disk systems. A high-order diffractive objective lens with a continuous surface relief is designed. Focus, tilt, and tracking servos are implanted with MEMS micro actuators. Preliminary design and test results are presented.en_US
dc.language.isoen_USen_US
dc.subjectdiffractive optical elementen_US
dc.subjectmicroelectromechanical system (MEMS)en_US
dc.subjectmicromirroren_US
dc.subjectoptical pickupen_US
dc.titleMEMS-based miniature optical pickupen_US
dc.typeArticle; Proceedings Paperen_US
dc.identifier.doi10.1109/TMAG.2004.842077en_US
dc.identifier.journalIEEE TRANSACTIONS ON MAGNETICSen_US
dc.citation.volume41en_US
dc.citation.issue2en_US
dc.citation.spage967en_US
dc.citation.epage970en_US
dc.contributor.department電控工程研究所zh_TW
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentInstitute of Electrical and Control Engineeringen_US
dc.contributor.departmentDepartment of Photonicsen_US
dc.identifier.wosnumberWOS:000227134600087-
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