標題: | Chemical vapor deposition of diamond on an adamantane-coated sapphire substrate |
作者: | Chen, Yi-Chun Chang, Li 材料科學與工程學系 Department of Materials Science and Engineering |
公開日期: | 2014 |
摘要: | Continuous diamond thin films can be grown on sapphire substrates by microwave plasma chemical vapor deposition utilizing a pretreatment of adamantane dip coating on the substrate for enhanced nucleation. Scanning electron microscopy, X-ray diffraction and Raman spectroscopy show that < 111 > oriented diamond films of good crystallinity can be deposited on adamantane-coated sapphire substrates. Cross-sectional transmission electron microscopy at the diamond/sapphire interface shows that diamond can be directly synthesized on sapphire without any interlayer. |
URI: | http://hdl.handle.net/11536/24530 http://dx.doi.org/10.1039/c4ra01042f |
ISSN: | 2046-2069 |
DOI: | 10.1039/c4ra01042f |
期刊: | RSC ADVANCES |
Volume: | 4 |
Issue: | 36 |
起始頁: | 18945 |
結束頁: | 18950 |
顯示於類別: | 期刊論文 |