完整後設資料紀錄
DC 欄位語言
dc.contributor.authorHuang, Yuan-Teen_US
dc.contributor.authorHsu, Wensyangen_US
dc.date.accessioned2014-12-08T15:36:51Z-
dc.date.available2014-12-08T15:36:51Z-
dc.date.issued2014-06-01en_US
dc.identifier.issn0167-9317en_US
dc.identifier.urihttp://dx.doi.org/10.1016/j.mee.2014.03.022en_US
dc.identifier.urihttp://hdl.handle.net/11536/25243-
dc.description.abstractHere a double-side multiple partial exposure (DoMPE) method is proposed to fabricate an embedded SU8 microstructure with more flexible inside cross section. The proposed method uses standard lithography equipment and needs only single-layer coating of negative photoresist SU-8 on glass substrate without bonding process. Process parameters, including development thickness at different front and back-side partial exposure doses, are experimentally characterized. Reflection effect due to Cr layer on glass substrate is shown to have influence on the development depth of SU-8 in front partial exposure. It is found that coating thicker SU-8 not only can reduce reflection effect, but also can attenuate cross-link effect due to exposure dose accumulation on SU-8 from both front and back sides. Finally, an embedded SU-8 microstructure is demonstrated to verify that the proposed DoMPE method needs only single-layer SU-8 coating to fabricate not just embedded microstructures, but also embedded microstructure with asymmetric inside cross section. (C) 2014 Elsevier B.V. All rights reserved.en_US
dc.language.isoen_USen_US
dc.subject3D microstructureen_US
dc.subjectEmbeddeden_US
dc.subjectSU-8en_US
dc.subjectDouble-side exposureen_US
dc.subjectPartial exposureen_US
dc.titleFabricating embedded SU-8 microstructures with asymmetric inside cross section by double-side multiple partial exposure methoden_US
dc.typeArticleen_US
dc.identifier.doi10.1016/j.mee.2014.03.022en_US
dc.identifier.journalMICROELECTRONIC ENGINEERINGen_US
dc.citation.volume121en_US
dc.citation.issueen_US
dc.citation.spage64en_US
dc.citation.epage67en_US
dc.contributor.department交大名義發表zh_TW
dc.contributor.department機械工程學系zh_TW
dc.contributor.departmentNational Chiao Tung Universityen_US
dc.contributor.departmentDepartment of Mechanical Engineeringen_US
dc.identifier.wosnumberWOS:000341471500016-
dc.citation.woscount1-
顯示於類別:期刊論文


文件中的檔案:

  1. 000341471500016.pdf

若為 zip 檔案,請下載檔案解壓縮後,用瀏覽器開啟資料夾中的 index.html 瀏覽全文。