標題: Synthesis and Characterization of Silicon and Nitrogen Containing Carbon-Based Crystals and Their Nanostructured Materials
作者: Chang, Hui Lin
Chang, Chi Tso
Kuo, Cheng Tzu
交大名義發表
材料科學與工程學系
National Chiao Tung University
Department of Materials Science and Engineering
公開日期: 2014
摘要: The synthesis of carbon-based materials, such as man-made diamonds, superhard C3N4 materials, SiCN crystals, and other carbon-based nanostructured materials, has attracted considerable attention for many decades in academic and industrial communities. However, so far, researchers have not successfully linked the growth mechanisms of carbon-based materials deposited under different synthetic conditions and methods. In fact, a single machine may produce many of these materials. This paper is aimed to study the linkages among various carbon-based materials synthesized on Si wafers using the same microwave plasma chemical vapor deposition system, including SiCN crystalline films, SiCN nanotubes, carbon nanotubes (CNTs), conical carbon nanorods, and other nanostructured materials. (C) The Author(s) 2014. Published by ECS. All rights reserved.
URI: http://hdl.handle.net/11536/25252
http://dx.doi.org/10.1149/2.0181410jss
ISSN: 2162-8769
DOI: 10.1149/2.0181410jss
期刊: ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY
Volume: 3
Issue: 10
起始頁: M65
結束頁: M70
顯示於類別:期刊論文


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