標題: | Synthesis and Characterization of Silicon and Nitrogen Containing Carbon-Based Crystals and Their Nanostructured Materials |
作者: | Chang, Hui Lin Chang, Chi Tso Kuo, Cheng Tzu 交大名義發表 材料科學與工程學系 National Chiao Tung University Department of Materials Science and Engineering |
公開日期: | 2014 |
摘要: | The synthesis of carbon-based materials, such as man-made diamonds, superhard C3N4 materials, SiCN crystals, and other carbon-based nanostructured materials, has attracted considerable attention for many decades in academic and industrial communities. However, so far, researchers have not successfully linked the growth mechanisms of carbon-based materials deposited under different synthetic conditions and methods. In fact, a single machine may produce many of these materials. This paper is aimed to study the linkages among various carbon-based materials synthesized on Si wafers using the same microwave plasma chemical vapor deposition system, including SiCN crystalline films, SiCN nanotubes, carbon nanotubes (CNTs), conical carbon nanorods, and other nanostructured materials. (C) The Author(s) 2014. Published by ECS. All rights reserved. |
URI: | http://hdl.handle.net/11536/25252 http://dx.doi.org/10.1149/2.0181410jss |
ISSN: | 2162-8769 |
DOI: | 10.1149/2.0181410jss |
期刊: | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY |
Volume: | 3 |
Issue: | 10 |
起始頁: | M65 |
結束頁: | M70 |
顯示於類別: | 期刊論文 |