標題: | SU-8 serial MEMS switch for flexible RF applications |
作者: | Chao, Tzu-Yuan Hsu, M. C. Lin, C-D Cheng, Y. T. 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
公開日期: | 1-二月-2011 |
摘要: | This paper presents a novel SU-8 micromachining process for MEMS series switch fabrication. The switch is designed with a clamped-clamped SU-8 (5 mu m)/Cu (2 mu m)/SU-8 (3 mu m) beam structure driven by electrostatic force, which is fabricated on a silicon substrate with a resistivity of similar to 5 Omega cm. Experimental results show that the switch can exhibit better than -4.48 dB insertion loss and -28.2 dB isolation up to 12 GHz. Such a large insertion loss is mainly caused by substrate loss which can be further reduced down to -0.75 dB as long as the substrate resistivity is increased up to 100 Omega cm. |
URI: | http://dx.doi.org/10.1088/0960-1317/21/2/025010 http://hdl.handle.net/11536/25846 |
ISSN: | 0960-1317 |
DOI: | 10.1088/0960-1317/21/2/025010 |
期刊: | JOURNAL OF MICROMECHANICS AND MICROENGINEERING |
Volume: | 21 |
Issue: | 2 |
結束頁: | |
顯示於類別: | 期刊論文 |