標題: Wafer-Level Self-Aligned Nano Tubular Structures and Templates for Device Applications
作者: Chen, K. N.
Arnold, J. C.
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: Tubular Structures;Templates;Self-Aligned
公開日期: 1-十二月-2010
摘要: A method to fabricate self-aligned nano-scale tubular structures is introduced and investigated. These tubular structures, can be fabricated on wafer-level using common CMOS technologies, are robust and cannot be removed through standard etching or resist strip techniques. This method has shown the potential to be used in different nano device applications since the size of nano-scale tubular structures is adjustable. In addition, these structures can be fabricated as nano-scale templates in advanced device applications.
URI: http://dx.doi.org/10.1166/jnn.2010.2943
http://hdl.handle.net/11536/26289
ISSN: 1533-4880
DOI: 10.1166/jnn.2010.2943
期刊: JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume: 10
Issue: 12
起始頁: 8145
結束頁: 8150
顯示於類別:期刊論文