標題: | Wafer-Level Self-Aligned Nano Tubular Structures and Templates for Device Applications |
作者: | Chen, K. N. Arnold, J. C. 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics |
關鍵字: | Tubular Structures;Templates;Self-Aligned |
公開日期: | 1-十二月-2010 |
摘要: | A method to fabricate self-aligned nano-scale tubular structures is introduced and investigated. These tubular structures, can be fabricated on wafer-level using common CMOS technologies, are robust and cannot be removed through standard etching or resist strip techniques. This method has shown the potential to be used in different nano device applications since the size of nano-scale tubular structures is adjustable. In addition, these structures can be fabricated as nano-scale templates in advanced device applications. |
URI: | http://dx.doi.org/10.1166/jnn.2010.2943 http://hdl.handle.net/11536/26289 |
ISSN: | 1533-4880 |
DOI: | 10.1166/jnn.2010.2943 |
期刊: | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY |
Volume: | 10 |
Issue: | 12 |
起始頁: | 8145 |
結束頁: | 8150 |
顯示於類別: | 期刊論文 |