Preparation and characterization of new low-dielectric thin-film materials with fluorine.

標題:	Preparation and characterization of new low-dielectric thin-film materials with fluorine.
作者:	Chuang, SH Wan, CY Chiu, HT 應用化學系 Department of Applied Chemistry
公開日期:	1-三月-2003
URI:	http://hdl.handle.net/11536/28078
ISSN:	0065-7727
期刊:	ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY
Volume:	225
Issue:
起始頁:	U88
結束頁:	U88
顯示於類別：	會議論文