Improved TaN barrier layer against Cu diffusion by formation of an amorphous layer using plasma treatment

Abstract

The thermal stability and electrical properties of plasma-treated TaN films have been investigated by Cu/TaN/Si systems. The properties of diffusion barrier were evaluated by sheet resistance, x-ray diffraction (XRD), transmission electron microscopy (TEM), x-ray photoelectron spectroscopy (XPS), energy-dispersive spectroscopy (EDS), Auger electron microscopy (AES), and reverse-biased junction leakage current. A new amorphous layer is found to form on the surface of TaN film after the plasma treatment, Plasma-treated TaN films show better barrier performance than untreated TaN films. The sheet resistance of Cu/TaN(10 nm)/Si increases apparently after annealing at 625 degreesC for 1 h, while the Cu/plasma-treated TaN(10 nm)/Si is fairly stable up to annealing at 750 degreesC. The resistance to copper diffusion in plasma-treated TaN film is more effective. This is attributed that an amorphous layer that forms on the surface of TaN film after the plasma treatment. The thermal stabilities of Cu/TaN/n(+)-p junction diodes are enhanced by plasma treatment. The Cu/TaN(10 nm)/n(+)-p and Cu/TaN(50 nm)/n(+)-p junction diodes result in large reverse-biased junction leakage currents after annealing at 525 and 575 degreesC, respectively. On the other hand, plasma-treated TaN diffusion barriers improve the integrity of junction diodes up to 650 degreesC. Nano crystallization and stuffing effects of plasma treatments are believed to impede Cu diffusion into the Si substrate and hence improve the barrier performance. (C) 2002 American Vacuum Society.