Title: | Growth mechanism and properties of the large area well-aligned carbon nano-structures deposited by microwave plasma electron cyclotron resonance chemical vapor deposition |
Authors: | Lin, CH Chang, HL Tsai, MH Kuo, CT 材料科學與工程學系 Department of Materials Science and Engineering |
Keywords: | carbon;electron cyclotron resonance (ECR);chemical vapor deposition (CVD);catalytic processes |
Issue Date: | 1-Mar-2002 |
Abstract: | Large area (4-inch diameter) well-aligned carbon nano-structures on Si substrate were successfully synthesized by using a catalyst-assisted microwave plasma electron cyclotron resonance chemical vapor deposition (ECR-CVD) system with CH4 as source gas. The catalysts include Fe, Co and Ni. The catalysts and the deposited nano-structures were characterized by scanning electron microscopy (SEM) transmission electron microscopy (TEM), Raman and field emission I-V measurements. Effects of process parameters on morphologies, structures and properties of the nano-structures were examined. The results show that the deposited nano-structures can include normal nano-tubes, split catalyst nano-tubes, seaweed-like nano-sheets and carbon film, depending mainly on substrate temperature and bias, catalyst materials and their application methods. Deposition mechanisms for different nano-structures, especially, the unique split catalyst nano-tubes and seaweed-like nano-sheets, were proposed. The differences in oxidation resistance and field emission proper-ties between different nano-structures will be compared and discussed. (C) 2002 Elsevier Science B.V. All rights reserved. |
URI: | http://dx.doi.org/10.1016/S0925-9635(01)00640-9 http://hdl.handle.net/11536/28984 |
ISSN: | 0925-9635 |
DOI: | 10.1016/S0925-9635(01)00640-9 |
Journal: | DIAMOND AND RELATED MATERIALS |
Volume: | 11 |
Issue: | 3-6 |
Begin Page: | 922 |
End Page: | 926 |
Appears in Collections: | Conferences Paper |
Files in This Item:
If it is a zip file, please download the file and unzip it, then open index.html in a browser to view the full text content.