Electrical properties of diamond-like carbon films deposited using a filtered cathodic arc system

Abstract

A new filter are deposition (FAD) system has been developed to satisfy the requirements of magnetic storage devices;. This work briefly describes the 45 degrees magnetic filter cathodic are deposition process and investigates how substrate bias, hydrogenating, and nitrogen-doping affect the electrical properties of amorphous diamond-like carbon films. Experimental results indicate that increasing in substrate bias and/or nitrogen doping into the film during the process would lower the resistance of the film. All these evidences indicate the pout-deposited film is more "graphite-like". The effect of hydrogen flow in the film is less significant. It is believed that the hydrogen can prevent the nucleation of the graphite phase, and can also stabilize of sp(3) bonding. The phenomenon clearly indicates that the film is more "diamond-like".