統計資料
總造訪次數
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|---|---|
| AlSixOy as a high-transmittance embedded material of ternary attenuated phase-shifting mask and correlation between chemical composition and optical properties of AlSixOy in 193 nm lithography | 111 |
本月總瀏覽
檔案下載
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| 000166820200008.pdf | 1 |
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