Finite Element Analysis of a MEMS-Based High G Inertial Shock Sensor

Abstract

Conventional mechanical inertial shock sensors typically use mechanisms such as cantilever beams or axial springs as triggering devices. Reaction time for these conventional shock sensors are either far too slow or, in many cases, fail to function completely for high G (> 300G) applications. In this study, a Micro-Electro-Mechanical (MEMS)-based high G inertial shock sensor with a measurement range of 3,000-21,000 G is presented. The triggering mechanism is a combination of cantilever and spring structure. The design of the mechanism underwent a series of analyses. Simulation results indicated that a MEMS-based high G inertial shock sensor has a faster reaction time than conventional G inertial shock sensors that use a cantilever beam or spring mechanism. Furthermore, the MEMS-based high G inertial shock sensor is sufficiently robust to survive the impact encountered in high G application where most conventional G inertial shock sensors fail.