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dc.contributor.authorLuo, JSen_US
dc.contributor.authorLin, WTen_US
dc.contributor.authorChang, CYen_US
dc.contributor.authorTsai, WCen_US
dc.date.accessioned2014-12-08T15:48:54Z-
dc.date.available2014-12-08T15:48:54Z-
dc.date.issued1998-07-01en_US
dc.identifier.issn0254-0584en_US
dc.identifier.urihttp://hdl.handle.net/11536/32518-
dc.description.abstractPulsed KrF laser annealing and vacuum annealing on the interfacial reactions of Ni/Si0.76Ge0.24 and Ni/Si were studied. For the Ni/ Si0.76Ge0.24 films annealed at temperatures above 300 degrees C, some Ge-rich Si1-xGex grains were formed between the Ge-deficient Ni germanosilicide grains, resulting in the island structure. For Ni/Si films homogeneous epitaxial NiSi2 films could be grown even at 600 degrees C. Ni silicide (germanosilicide) associated with the amorphous overlayer was generally formed at lower energy densities for Ni/Si, NiSi/Si, Ni/Si0.76Ge0.24 and Ni(Si1-xGex) /Si0.76Ge0.24 systems, respectively. At higher energy densities constitutional supercooling occurred. The energy densities at which constitutional supercooling appeared were higher for NiSi and Ni(Si1-xGex) than for Ni. For the continuous Ni(Si1-xGex) films grown at 200 degrees C in a vacuum furnace, subsequent laser annealing at an energy density of 0.6-1.0 J cm(-2) have shown to render homogeneous Ni(Si0.76Ge0.24)(2) and Si0.76Ge0.24 films without the island structure and Ge segregation. (C) 1998 Elsevier Science S.A. All rights reserved.en_US
dc.language.isoen_USen_US
dc.subjectinterfacial reactionsen_US
dc.subjectlaser annealingen_US
dc.titleInterfacial reactions of Ni on Si0.76Ge0.24 and Si by pulsed laser annealingen_US
dc.typeArticle; Proceedings Paperen_US
dc.identifier.journalMATERIALS CHEMISTRY AND PHYSICSen_US
dc.citation.volume54en_US
dc.citation.issue1-3en_US
dc.citation.spage160en_US
dc.citation.epage163en_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.identifier.wosnumberWOS:000074671500031-
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