標題: | DESIGN CONSIDERATIONS OF METAL-FILM BOLOMETER WITH MICROMACHINED FLOATING MEMBRANE |
作者: | SHIE, JS WENG, PK 交大名義發表 光電工程學系 National Chiao Tung University Department of Photonics |
公開日期: | 1-六月-1992 |
摘要: | A metal-film microbolometer formed on a glass membrane suspended on a silicon substrate has been fabricated by the anisotropic etching technique. The rectangular glass membrane is supported by its four leads connected to the corners of an etched V-groove cavity. This structure allows flexible thermal management and sensitivity optimization of the bolometer for different kinds of application, with a trade-off between lead thermal impedance and device active area. Optimizations of the structure applied to both a focal-plane array and a single detector are interpreted. A thermal impedance as high as 4 x 10(5)-degrees-C/W with a response time of several milliseconds can be achieved. For a 320-mu-m x 320-mu-m detector, theoretical predictions give a responsivity and normalized detectivity of over 700 V/W and 10(9) cm square-root Hz/W, respectively. For dimensions of 128-mu-m x 128-mu-m, suitable for a focal-plane-array detector, theory predicts a D* of 5.5 x 10(8). A discrepancy exists between the experiment and the theory, which is also discussed. |
URI: | http://hdl.handle.net/11536/3401 |
ISSN: | 0924-4247 |
期刊: | SENSORS AND ACTUATORS A-PHYSICAL |
Volume: | 33 |
Issue: | 3 |
起始頁: | 183 |
結束頁: | 189 |
顯示於類別: | 期刊論文 |