A PRECISION ALIGNMENT WITH MOIRE TECHNIQUE AND DIFFERENTIAL-AMPLIFIER

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.author	CHANG, TC	en_US
dc.contributor.author	WU, CW	en_US
dc.contributor.author	CHOU, C	en_US
dc.date.accessioned	2014-12-08T15:04:54Z	-
dc.date.available	2014-12-08T15:04:54Z	-
dc.date.issued	1992-06-01	en_US
dc.identifier.issn	0021-4922	en_US
dc.identifier.uri	http://dx.doi.org/10.1143/JJAP.31.1940	en_US
dc.identifier.uri	http://hdl.handle.net/11536/3410	-
dc.description.abstract	A precision alignment technique is developed. We combined a moire and a differential amplifier to align two Ronchi rulings with high accuracy. The precision of this technique can reach submicron level if higher spatial frequency of the ruling is used.	en_US
dc.language.iso	en_US	en_US
dc.subject	MOIRE FRINGES	en_US
dc.subject	RONCHI RULING	en_US
dc.title	A PRECISION ALIGNMENT WITH MOIRE TECHNIQUE AND DIFFERENTIAL-AMPLIFIER	en_US
dc.type	Note	en_US
dc.identifier.doi	10.1143/JJAP.31.1940	en_US
dc.identifier.journal	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS	en_US
dc.citation.volume	31	en_US
dc.citation.issue	6A	en_US
dc.citation.spage	1940	en_US
dc.citation.epage	1941	en_US
dc.contributor.department	光電工程學系	zh_TW
dc.contributor.department	Department of Photonics	en_US
dc.identifier.wosnumber	WOS:A1992JH48300053	-
dc.citation.woscount	0	-
顯示於類別：	期刊論文

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