晶片式奈米鎳柱鐵芯螺旋電感之研究

Abstract

在此篇論文中，我們使用奈米鎳柱應用於高頻螺旋電感，利用空間中相對磁導率的提升來增加電感值，以達到無線通訊應用晶片面積微小化的目標。直徑70nm，高度1μm 的奈米鎳柱是利用沉積在矽基板上的陽極氧化鋁模板以無電鍍方法所製成，規則的奈米鎳柱陣列被高電阻率的陽極氧化鋁模板所分隔，有效的避免了電感在高頻應用時所產生在磁性材料的渦電流損耗。在本實驗設計中，奈米鎳柱以兩種方式來應用於螺旋電感，觀察奈米鎳柱鐵芯受到電感不均勻的磁場磁化下，所得到的奈米鎳柱鐵芯電感高頻特性。最後，已完成的三圈半奈米鎳柱鐵芯螺旋電感的高頻特性被量測由0.1GHz到20GHz，電感值約有3 % 的增加在3GHz，且持續到達6.9GHz為止，奈米鎳柱鐵芯電感的品質因數為14在1.1GHz。

In this thesis, we fabricated RF spiral inductors via the incorporation of Ni nanorods, the inductance can be increased due to the relative permeability enhancement in the space. The smaller size of the inductor can reduce the wireless communication application chip area and cost down. The Ni nanorods with 70nm diameter and 1μm long were electroplated in anodic alumina oxide (AAO) template on silicon substrate. The regular Ni nanorod arrays are isolated in AAO template which can effectively avoid the eddy current loss in the layer of the magnetic materials. In this experiment, we designed two type spiral inductors with Ni nanorods core and made a study of their high frequency characteristics in non-uniform magnetic field that are induced the inductors. On-chip magnetic spiral inductors with Ni nanorod arrays core have been fabricated and characterized up to 20GHz. The 3.5 turns inductor with Ni nanorods core of inductance enhancement over the air core value is ~3% at 3GHz and until the frequency up to 6.9 GHz, the quality factor Q is 14 at 1.1GHz.