FORMATION AND CHARACTERIZATION OF A PTSI CONTACTED N+P SHALLOW JUNCTION

doi:10.1063/1.346531

標題:	FORMATION AND CHARACTERIZATION OF A PTSI CONTACTED N+P SHALLOW JUNCTION
作者:	TSUI, BY CHEN, MC 交大名義發表電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering
公開日期:	1-Sep-1990
URI:	http://dx.doi.org/10.1063/1.346531 http://hdl.handle.net/11536/4028
ISSN:	0021-8979
DOI:	10.1063/1.346531
期刊:	JOURNAL OF APPLIED PHYSICS
Volume:	68
Issue:	5
起始頁:	2265
結束頁:	2274
Appears in Collections:	Articles