腦神經訊號感測元件開發與系統整合應用

Abstract

此論文討論各式腦神經電訊號感測器與生醫電子電路系統設計相關研究，以應用於神經醫療微系統整合為最終目的。研究內容包括(一) 微機電針狀乾式電極，使用於腦電波紀錄，擁有優秀的感測介面阻抗表現；具有自我穩定機制與可應用於光動力療法之微探針陣列亦在本論文中逐一探討。(二) 可撓性大腦皮層感測電極陣列，利用高分子聚合物製造，可應用於腦部表面電位量測，此成果已在聲音刺激大鼠腦部聽覺神經反應紀錄中獲得驗證。(三) 三維神經探針感測陣列，以觀察與紀錄神經訊號在三維神經組織空間中的傳遞以及訊號源的分析為目的，其相關製程與封裝技術可用於與後級晶片整合。(四)無線傳能系統，包括了電感耦合線圈以及低壓降整流器製作，可用於無電池之微系統應用。(五)多通道類比前端放大器的設計與製作，其具有低功耗低雜訊的特色，並結合微控器與藍芽傳輸介面設計，做為各式神經訊號感測之醫療輔具應用系統之初步實現。上述諸類感測器涵蓋了各式腦神經電訊號範圍，而電源與感測電路設計亦為生醫微系統不可或缺的重要角色，搭配其他電子元件即可成為應用於生醫感測之整合式微系統。

In this dissertation, versatile neural sensors and electronics are developed for biomedical microsystems integration. Presented devices include (1) MEMS surface mounted dry electrode (MDE), which provides superior low interface impedance performance. Alternative diamond-shaped MDE and transparent MDE for self-stability enhancement and PDT applications are also reported. (2) Flexible gird electrode array using parylene-C as structure is fabricated for ECoG recording with in-vivo auditory response recording in rat. (3) Stacked three dimensional (3D) microprobe array developed for implantable neural recording provides simple process, solid structure with possibility for system integration, design flexibility and volume usage efficiency. The neural signal data acquired by the 3D array achieves the recording and mapping of the neural signal network and interconnections among the target brain structure, which allows further studies for event-related observation. (4) Wireless RF-powering electronics, which is designed for implantable biomedical microsystem applications. Miniaturized spiral coils as a wireless power module and low-dropout linear regulator circuit convert RF signal into DC voltage for batteryless applications. (5) 16-channel analog front end neural amplifier is introduced for biopotential conditioning, which offers technical merits of reduced supply voltage, sufficient low power per channel and reasonable low noise performance, yet offers integration with micro controller unit and Bluetooth modules for conceptual biomedical microsystem representation. Proposed sensors and electronics provide versatile neural recording and key component realization in microsystem design, as well as achieving the development of biomedical prosthesis applications by integrating with commercial modules.