應用故障分析與實驗設計發展TFT-LCD彩色濾光片缺陷修補方法

Abstract

在薄膜電晶體液晶顯示器 (Thin-Film Transistor Liquid-Crystal Display ,TFT-LCD)之生產過程中會因生產製程的變異而產生缺陷，對應此問題有三種方法，第一為改善製程能力，其次為降低製程變異，最後是發展缺陷修補技術。本研究之主要目的是應用實驗設計及故障分析法(Failure Analysis)建構一套彩色濾光 片修補缺陷方法，提升彩色濾光片修補成功率，本研究應用台灣某TFT-LCD公司之實際產品資料驗証了本研究方法確實可效。本研究成果可提供業界在修補彩色濾光片缺陷時作為導入新式修補技術平台之參考。

The process of Thin-Film Transistor Liquid-Crystal Display (TFT-LCD) may have all kinds of defects caused by process variation. To control the defect yield lost caused by defect, follow three methods are available: enhancing the process capability, reducing the chance of extraordinary process variation and developing new technique to repair the defect. The main objective of this study is to develop a repairing method for TFT-LCD Color Filter Using Design of Experiments (DOE) and Failure Analysis (FA) . One Case to illustrate of effectiveness of the proposed method .The proposed method can be employed as a reference for developing a new technique to repair the defect.