廠務外包作業管理及安全危害分析 -以晶圓廠氣化供應系統外包為例

Abstract

本論文是研究如何在藉由某晶圓廠為例，以廠務氣體/化學系統相關外包作業管理及安全危害分析為基礎，利用資料庫平台建構e化外包管理系統，提供系統管理者資料快速查詢途徑及外包人員正確紀錄作業Data，有效降低處理日常用量週月報統計作業時間及系統相關異常事件之處理時效;並利用危害分析達到降低人員安全風險及系統穩定運轉目的。

並利用資料庫平台建構e化失效模式與效應分析方法（Failure Mode and Effects Analysis，FMEA），提出一個可靠度及風險分析技術，針對此案例晶圓廠廠務氣體/化學系統外包作業項目，事先評估氣體/化學系統運轉及外包人員運轉操作可能之失效模式，並依據評定之半量化因子，評估及計算風險等級，列出改善順序與策略，以提供廠務運轉及系統負責人員採取事先預防措施，以避免系統發生立即性之危害，並做為系統及外包作業持續改善之依據，達到系統穩定運轉及外包人員安全之目標；並藉由系統可靠度的提昇，來強化產品的品質，降低財產的損失，以達增強產業競爭力之最終目的。

This thesis takes an integrated-circuit foundry as an example to study how the facility utilizes its gas/chemical supply outsourcing operation management and safety risk analysis techniques to construct an e-information management platform system. This system provides an efficient data query function for the system administrator to compile the routine gas/chemical consumption data and to timely complete the abnormal event disposition. In addition, the foundry exercised the hazard analysis methodology to reduce the personnel safety risk and meanwhile maintain a stable operating system.

For risk minimization and prevention, the hazard risk analysis technique is developed based on the Failure Mode and Effects Analysis – FMEA methodology by e-information management platform system. The wafer manufacturer adopted its gas/chemical supply outsourcing operation tasks to pre-assess the potential failure modes that could have occurred during the system and personnel operation flow, and bases on the semi-quantified factors to evaluate the corresponding risk levels. The improvement actions were developed and prioritized based on the calculated risk levels for facility operation and system administrator to take preventive measures. The execution of this technique minimizes the risk of immediate danger and supports as the basis of continuous improvement of the outsourced operation to maintain a stable supply system and protect personnel safety. In examining the benefit of this program, the system reliability is increased, product quality is enhanced, and property loss is decreased which facilitates the achievement of the ultimate goal of elevating the company’s competitiveness.