標題: | 高頻振動式微結構疲勞測試方法的研發 Development of a High Frequency Fatigue Test Method |
作者: | 林軒宇 Lin, Hsuan-Yu 徐文祥 Hsu, Wen-Syang 機械工程學系 |
關鍵字: | 激振;單晶矽;S-N曲線;疲勞試驗;excitation;single-crystal silicon;S-N curve;fatigue test |
公開日期: | 2009 |
摘要: | 在微機電(MEMS)領域中有越來越多的產品,例如:致動器跟感測器被大量的商品化,而這些商品有很大部分裡面的結構都必須承受長期的重複使用,所以這時候為了確保產品的可靠度,微系統的疲勞測試就變得相當重要。
本論文主要目標是建立一種利用激振方式的新式快速疲勞測試方法,同時定義此方法的可行性條件,並建立實驗的步驟與方法,本論文中利用電鍍鎳與單晶矽這兩種材料來驗證實驗的可行性分析,並將單晶矽的S-N曲線利用此方法量測出來與其他論文的數據比較,證明此新式疲勞測試方法確實適用。 Up to now, there are more and more commercialized micro-electro-mechanical systems (MEMS) products that part of the consisted components such as microactuator and microsensor need long-term and repetitive operation. In order to ensure the long-term reliability of these MEMS products, the fatigue test plays an important role. In this study, employing the excitation method, a new and fast fatigue test is proposed and established. Furthermore, the test criterion and feasibility study are also discussed and demonstrated by the common MEMS-materials of electroplated nickel and single-crystal silicon. According to the experimental results, the derived S-N curve of single-crystal silicon conforms to the ones from previous literatures. |
URI: | http://140.113.39.130/cdrfb3/record/nctu/#GT079614535 http://hdl.handle.net/11536/42103 |
顯示於類別: | 畢業論文 |