高頻振動式微結構疲勞測試方法的研發

Abstract

在微機電(MEMS)領域中有越來越多的產品，例如：致動器跟感測器被大量的商品化，而這些商品有很大部分裡面的結構都必須承受長期的重複使用，所以這時候為了確保產品的可靠度，微系統的疲勞測試就變得相當重要。 本論文主要目標是建立一種利用激振方式的新式快速疲勞測試方法，同時定義此方法的可行性條件，並建立實驗的步驟與方法，本論文中利用電鍍鎳與單晶矽這兩種材料來驗證實驗的可行性分析，並將單晶矽的S-N曲線利用此方法量測出來與其他論文的數據比較，證明此新式疲勞測試方法確實適用。

Up to now, there are more and more commercialized micro-electro-mechanical systems (MEMS) products that part of the consisted components such as microactuator and microsensor need long-term and repetitive operation. In order to ensure the long-term reliability of these MEMS products, the fatigue test plays an important role. In this study, employing the excitation method, a new and fast fatigue test is proposed and established. Furthermore, the test criterion and feasibility study are also discussed and demonstrated by the common MEMS-materials of electroplated nickel and single-crystal silicon. According to the experimental results, the derived S-N curve of single-crystal silicon conforms to the ones from previous literatures.