氬離子處理聚醯亞胺薄膜表面之液晶配向及預傾角調變機制與表面分析之研究

Abstract

利用氬離子處理聚醯亞胺薄膜表面來產生配向，取代傳統接觸式摩刷 配向，進而改善表面的清潔度，並避免殘留的靜電荷，更重要可以調變預 傾角的大小。 本論文中的分為兩個部分，第一為離子轟擊表面之時間與能量之效 應、第二為電漿處理表面之時間與能量之效應。由於離子在高能量或長時 間轟擊表面下，發現基板表面出現氧化鐵顆粒，因此，利用電漿處理時可 在表面沉積氧化鐵顆粒，並改變處理能量及時間可調變氧化鐵顆粒大小、 表面粗糙度，甚至氧化鐵沉積時與聚醯亞胺薄膜產生不同的化學鍵結，進 而調變預傾角大小。 文中會針對不同參數的樣品量測預傾角，並對樣品表面進行分析，所 使用的方法有:原子力顯微鏡、掃描式電子顯微鏡、表面能分析及化學分 析能譜儀，以進一步了解調變預傾角的機制。

The widely-used mechanical rubbing alignment in a liquid crystal display has some disadvantages such as leaving the debris, scratches and surface electrostatic charge. To avoid these drawbacks, Argon ion beam treating surface of polyimide (PI) film in favor of and pretilt angle controlling has been studied. An ability of inducing high pretilt angle is observed in this work. The aggregation of Fe2O3 deposit on surface due to high energy and long time ion beam bombarding. Therefore, influences of treating time and plasma energy on the alignment are discussed. To realize the mechanism of surface alignment with pretilt angle, the relation between the surface roughness and particle size has been characterized by atomic force microscope (AFM) and scanning electron microscope (SEM). Further investigations on the chemical bond on the treated surfaces have been carried out by x-ray photoelectron spectroscopy (XPS).