REFRACTIVE-INDEX PROFILE MEASUREMENT OF COMPOUND THIN-FILMS BY ELLIPSOMETRY

標題:	REFRACTIVE-INDEX PROFILE MEASUREMENT OF COMPOUND THIN-FILMS BY ELLIPSOMETRY
作者:	HO, JH LEE, CL LEI, TF 交大名義發表電控工程研究所 National Chiao Tung University Institute of Electrical and Control Engineering
公開日期:	3-八月-1989
URI:	http://hdl.handle.net/11536/4310
ISSN:	0013-5194
期刊:	ELECTRONICS LETTERS
Volume:	25
Issue:	16
起始頁:	1084
結束頁:	1086
顯示於類別：	期刊論文