高科技產業高沸點製程廢氣調查技術研究

Abstract

國內相關半導體與光電廠等高科技產業興起，光電產業在前段列陣(Array)製程之製造技術與半導體雷同，其差別僅為將技術分別應用於玻璃基板或晶圓上，此兩大產業於此製程中皆產生大量的製程廢氣，其乃由清洗溶劑、光阻稀釋劑以及去光阻劑等揮發所致。 本研究主要針對製程中所使用的清洗溶劑、光阻劑以及去光阻劑等揮發性有機物(Volatile organic compounds, VOCs)以及半揮發性有機物(Semivolatile organic compounds SVOCs)等共計十二項目標化合物建立採樣分析技術。方法建立係利用衝擊瓶（Impinger）之採樣方式，搭配氣相層析儀/火焰離子化偵測器(Gas chromatography-Flame ionization detector, GC-FID)與離子層析儀(Ion Chromatography, IC)作為主要分析方法，針對半導體廠及光電廠等相關高科技產業目標化合物之濃度進行調查。 本研究所建立的偵測極限(MDL)依各目標化合物之分析設備不同，有機物之MDL為0.027 mg/L至0.263 mg/L之間，至於無機物之MDL則分別為小於0.001 µg/L至0.073 µg/L，精密度範圍為小於0.1 %至2.9 %，準確度範圍由85.0 %至113.3 %。在實廠的調查結果中發現兩種產業的廢氣種類均包含乙醇胺(MEA)、二甲亞碸(DMSO)、丙二醇單甲基醚(PGME)、丙二醇單甲基醚酯(PGMEA) 與環己酮(CHN)等化學物質，其中半導體廠廢氣濃度低於光電廠，另外半導體產業廢氣中還有氫氧化四甲銨（TMAH），至於光電廠廢氣中則有二乙二醇單丁醚(BDG)。整體而言，本研究針對高沸點製程廢氣，建立了完整的採樣分析方法。

As the yields of semiconductor and TFT - LCD panel production technology industries continuously increase, the environmental consciousness is also raising. The Environmental Protection Agency (EPA) of Taiwan therefore tightens the air pollution control and emission regulations. Properly evaluating the removal efficiencies of treatment units from process exhausts have become a very important issue both for the industrial plants and the EPA. In this research, sampling and analysis for the high boiling point compounds were developed. They can provide representative efficiency evaluation of the treatment units for removing the high boiling point compounds which often exist in the thinners and strippers. The high boiling point air pollutants being investigated were ethanolamine (MEA), dimethyl sulfoxide (DMSO), diethylene glycol butyl ether (BDG), tetramethylammonium hydroxide (TMAH), propylene glycol methyl ether (PGME), propylene glycol methyl ether acetate (PGMEA), 1-Methyl -2-pyrrolidinone (NMP), cyclo-hexanone (CHN) and tetra-methyl-ammonium hydroxide (TMAH). The process exhaust was sampled with impingers, then analyzed using either gas chromatographer/flame ionization detector or ion chromatographer. The detection limits in this study for organic compounds were 0.027~0.263 mg/L, and for the inorganic compounds they were less than 0.001~0.073 μg/L. The precision range was less than 0.1~2.9 %, the accuracy range was from 85.0 ~ 113.3 %.