工程資料分析系統於TFT-LCD產業之應用研究 : 圖形化缺陷解析之個案研究

Abstract

快速改善製造流程以提高產品良率是高科技產業降低製造成本，提高競爭力並進而提高市場佔有率的利器，也是目前已高度成熟發展的高科技製造業勝出的關鍵因子。光電、半導體製造業使用的工程資料分析系統(Engineering Data Analysis System , EDA )是一套資料擷取與分析系統，此系統透過自動擷取製造流程中各檢測、量測站點之詳細製程數據並進行統計分析。當產品有瑕疵時，製程工程師利用該系統的統計分析結果，可快速找尋製造流程中有問題的關鍵機台及關鍵製程參數。若能透過已建立的問題分析模式，適當的調整問題機台及製程參數，即可迅速提高產品良率。 本論文以TFT-LCD產業為例，探討如何透過使用EDA各項功能，建立屬於工廠生產過程中之良率解析模式，並說明此產業是如何快速提高製程良率。且藉由面板製造過程中之生產資訊萃取與資料探勘作分析與介紹，並利用EDA系統的各項圖表工具說明在TFT-LCD產業中如何追縱不良產品的成因，且以面板廠實務案例來說明產品良率解析流程，包含面板三個主要製程Array、Cell、Color Filter製程中造成產品缺陷產生之成因機台追蹤以及各種Defect Map 觀察，良率解析模式的建立。

Rapid improvement of the manufacturing process is the effective tool to help high-tech industry to improve product yield, reduce manufacturing costs and increase competitiveness. It can help increase market share and is also the key factor to stand ahead in high-tech manufacturing industries. In view of the past, due to lack of research in data acquisition and statistical analysis during manufacturing process within TFT-LCD industry, it is not easy to find out the critical cause of the product defect during manufacturing. Thus, it affects production line to improve manufacturing process and product yield. This study will use the Engineering Data Analysis System (EDA) to put forward feasible improvement plan for the above-mentioned shortcomings. EDA is a data acquisition and analysis system, which can automatically retrieve detailed process data in the detection and measurement steps to proceed with statistical analysis. When the product has defect, the process engineers can use the analysis to find the problem machines and the critical process parameters. Through the established problem analysis model to adjust problem machine and process parameters can increase product yields rapidly. In this study, TFT-LCD industry is used as an example to help explore how to use EDA functions effectively and show how this industry improve the process yield. Moreover, Information Extraction and Data Mining of TFT-LCD manufacturing are utilized to help in the study analysis. EDA chart tools and TFT-LCD industry’s actual cases are also used to descript how to trace the causes of defective products and to explain the process analysis of product yield.